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KMID : 1102020180480040122
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Applied Microscopy
2018 Volume.48 No. 4 p.122 ~ p.125
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Transmission Electron Microscopy Specimen Preparation for Two Dimensional Material Using Electron Beam Induced Deposition of a Protective Layer in the Focused Ion Beam Method
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An Byeong-Seon
Shin Yeon-Ju
Ju Jae-Seon
Yang Cheol-Woong
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Abstract
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The focused ion beam (FIB) method is widely used to prepare specimens for observation by transmission electron microscopy (TEM), which offers a wide variety of imaging and analytical techniques. TEM has played a significant role in material investigation. However, the FIB method induces amorphization due to bombardment with the high-energy gallium (Ga+) ion beam. To solve this problem, electron beam induced deposition (EBID) is used to form a protective layer to prevent damage to the specimen surface. In this study, we introduce an optimized TEM specimen preparation procedure by comparing the EBID of carbon and tungsten as protective layers in FIB. The selection of appropriate EBID conditions for preparing specimens for TEM analysis is described in detail.
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KEYWORD
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2-D materials, Focused ion beam (FIB), Electron beam induced deposition (EBID)
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